New methods, mechanisms, and models of vapor deposition; proceedings. (Materials Research Society symposium proceedings; v.616)

by MRS Symposium on New Methods, Mechanisms and Models fof Vapor Deposition (2000: San Francisco, CA) Ed. by Haydn N.G. Wadley et al

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Materials Research Society, 2000. Hardbound. New Book. Hardbound. The 39 papers introduce new methods of vapor deposition, address the mechanisms and in situ characterization techniques to observe them, and explore the application of modeling techniques to simulate the growth of vapor deposited structures and in situ sensors to validate those simulations. The invited papers cover challenges and opportunities of sensing material growth within production deposition tools, and the atomic layer deposition of thin films using sequential surface reactions. (©2001 Book News, Inc., Portland, OR)

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