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Advanced Processes for 193-NM Immersion Lithography
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Advanced Processes for 193-NM Immersion Lithography Hardcover - 2009

by Yayi Wei


From the publisher

Includes bibliographical references and index.

Details

  • Title Advanced Processes for 193-NM Immersion Lithography
  • Author Yayi Wei
  • Binding Hardcover
  • Pages 315
  • Volumes 1
  • Language ENG
  • Publisher SPIE-International Society for Optical Engine
  • Date 2009-02
  • Illustrated Yes
  • ISBN 9780819475572 / 0819475572
  • Library of Congress subjects Integrated circuits - Design and construction, Immersion lithography
  • Library of Congress Catalog Number 2008050743
  • Dewey Decimal Code 621.381
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Advanced Processes for 193-NM Immersion Lithography
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Advanced Processes for 193-NM Immersion Lithography

by Wei, Yayi

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Hardcover
ISBN 10 / ISBN 13
9780819475572 / 0819475572
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SPIE-International Society for Optical Engine, 2009. Hardcover. Like New. Pages are clean and are not marred by notes or folds of any kind. ~ ThriftBooks: Read More, Spend Less.Dust jacket quality is not guaranteed.
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Advanced Processes for 193-nm Immersion Lithography (SPIE Press Monograph Vol. PM189)
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Advanced Processes for 193-nm Immersion Lithography (SPIE Press Monograph Vol. PM189)

by Yayi Wei/ Robert L. Brainard

  • New
  • Hardcover
Condition
New
Binding
Hardcover
ISBN 10 / ISBN 13
9780819475572 / 0819475572
Quantity Available
1
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Exeter, Devon, United Kingdom
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This seller has earned a 3 of 5 Stars rating from Biblio customers.
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$114.78
$12.56 shipping to USA

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Description:
SPIE Publications, 2009. Hardcover. New. new ed. edition. 360 pages. 10.10x7.10x1.00 inches.
Item Price
$114.78
$12.56 shipping to USA