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Handbook of Semiconductor Manufacturing Technology
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Handbook of Semiconductor Manufacturing Technology Hardcover - 2007

by Contribution by Syed Rizvi; Yoshio Nishi (Editor); Contribution by Alain C. Diebold


From the publisher

Retaining the comprehensive and in-depth approach that cemented the bestselling first edition's place as a standard reference in the field, the Handbook of Semiconductor Manufacturing Technology, Second Edition features new and updated material that keeps it at the vanguard of today's most dynamic and rapidly growing field. Iconic experts Robert Doering and Yoshio Nishi have again assembled a team of the world's leading specialists in every area of semiconductor manufacturing to provide the most reliable, authoritative, and industry-leading information available. Stay Current with the Latest Technologies
In addition to updates to nearly every existing chapter, this edition features five entirely new contributions on...

  • Silicon-on-insulator (SOI) materials and devices
  • Supercritical CO2 in semiconductor cleaning
  • Low-? dielectrics
  • Atomic-layer deposition
  • Damascene copper electroplating
  • Effects of terrestrial radiation on integrated circuits (ICs) Reflecting rapid progress in many areas, several chapters were heavily revised and updated, and in some cases, rewritten to reflect rapid advances in such areas as interconnect technologies, gate dielectrics, photomask fabrication, IC packaging, and 300 mm wafer fabrication. While no book can be up-to-the-minute with the advances in the semiconductor field, the Handbook of Semiconductor Manufacturing Technology keeps the most important data, methods, tools, and techniques close at hand.
  • Details

    • Title Handbook of Semiconductor Manufacturing Technology
    • Author Contribution by Syed Rizvi; Yoshio Nishi (Editor); Contribution by Alain C. Diebold
    • Binding Hardcover
    • Edition INTERNATIONAL ED
    • Pages 1720
    • Volumes 1
    • Language ENG
    • Publisher CRC Press, Boca Raton
    • Date 2007
    • Illustrated Yes
    • ISBN 9781574446753 / 1574446754
    • Weight 6.05 lbs (2.74 kg)
    • Dimensions 9.97 x 7.27 x 2.69 in (25.32 x 18.47 x 6.83 cm)
    • Library of Congress subjects Semiconductors - Design and construction, Semiconductor industry
    • Library of Congress Catalog Number 2006102599
    • Dewey Decimal Code 621.381

    Media reviews

    Citations

    • Scitech Book News, 12/01/2007, Page 158
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    Handbook of Semiconductor Manufacturing Technology
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    Handbook of Semiconductor Manufacturing Technology

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    Handbook of Semiconductor Manufacturing Technology, Second Edition
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    Handbook of Semiconductor Manufacturing Technology, Second Edition

    by Nishi, Yoshio (Edited by)/ Doering, Robert (Edited by)

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    Handbook of Semiconductor Manufacturing Technology
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    Handbook of Semiconductor Manufacturing Technology

    by Doering, Robert [Editor]; Nishi, Yoshio [Editor];

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    9781574446753 / 1574446754
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