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Handbook of Semiconductor Silicon Technology
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Handbook of Semiconductor Silicon Technology Hardcover - 1990 - 1st Edition

by William C. O'Mara; Robert B. Herring; Lee P. Hunt


From the publisher

This handbook is a comprehensive summary of the science, technology and manufacturing of semiconductor silicon materials. Every known property of silicon is detailed. A complete set of binary phase diagrams is included. Practical aspects such as materials handling, safety, impurity and defect reduction are also discussed in depth. Fundamentals in the areas of silicon precursor compounds, polysilicon, silicon crystal growth, wafer fabrication, epitaxial and CVD deposition are addressed by experts in these fields. Materials properties covered include electrical, optical and mechanical properties, deep level impurities and carrier lifetime, and thermochemistry, as well as specific sections on oxygen, carbon, and nitrogen impurities. The book contains an extensive set of references, tables of materials constants, and silicon properties, and a presentation on the state of the art of materials manufacturing.

Details

  • Title Handbook of Semiconductor Silicon Technology
  • Author William C. O'Mara; Robert B. Herring; Lee P. Hunt
  • Binding Hardcover
  • Edition number 1st
  • Edition 1
  • Pages 816
  • Volumes 1
  • Language ENG
  • Publisher William Andrew, Parkdridge, New Jersey, U.S.A.
  • Date 1990-12-31
  • Illustrated Yes
  • Features Bibliography, Illustrated, Index
  • ISBN 9780815512370 / 0815512376
  • Weight 2.6 lbs (1.18 kg)
  • Dimensions 9.16 x 6.34 x 1.68 in (23.27 x 16.10 x 4.27 cm)
  • Library of Congress Catalog Number 89077167
  • Dewey Decimal Code 621.381
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Handbook of Semiconductor Silicon Technology (Materials Science and Process Technology)
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Handbook of Semiconductor Silicon Technology (Materials Science and Process Technology)

by O'Mara, William C.; Herring, Robert B.; Hunt, Lee P

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Hardcover
ISBN 13
9780815512370
ISBN 10
0815512376
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William Andrew, 1990-01-14. Hardcover. New. New. In shrink wrap. Looks like an interesting title!
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Handbook of Semiconductor Silicon Technology (Materials Science and Process Technology)
Stock Photo: Cover May Be Different

Handbook of Semiconductor Silicon Technology (Materials Science and Process Technology)

by O'Mara, William C.; Herring, Robert B.; Hunt, Lee P

  • New
  • Hardcover
Condition
New
Binding
Hardcover
ISBN 13
9780815512370
ISBN 10
0815512376
Quantity Available
5
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campbelltown, Florida, United States
Seller rating:
This seller has earned a 5 of 5 Stars rating from Biblio customers.
Item Price
$341.00
$25.00 shipping to USA

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Description:
William Andrew. Hardcover. New. 9x6x1.
Item Price
$341.00
$25.00 shipping to USA