Introduction to Microelectronic Fabrication: Volume 5 (Modular Series on Solid State Devices) Paperback - 2001
by Richard Jaeger
From the rear cover
Introduction to Microelectronic Fabrication, Second Edition, by Richard C. Jaeger, is a concise survey of the most up-to-date techniques in the field. It is devoted exclusively to processing and is highlighted by careful explanations, clean, simple language, and numerous fully solved example problems.
The second edition includes an entirely new chapter on MEMS, as well as substantial modifications to the chapters on MOS and bipolar process integration. Also included is new or expanded coverage of lithography and exposure systems, trench isolation, chemical mechanical polishing, shallow junctions, transient enhanced diffusion, copper Damascene processes and process simulation.
Details
- Title Introduction to Microelectronic Fabrication: Volume 5 (Modular Series on Solid State Devices)
- Author Richard Jaeger
- Binding Paperback
- Edition [ Edition: secon
- Pages 336
- Volumes 1
- Language ENG
- Publisher Pearson, USA
- Date October 17, 2001
- Illustrated Yes
- ISBN 9780201444940 / 0201444941
- Weight 1.04 lbs (0.47 kg)
- Dimensions 9.2 x 7 x 0.48 in (23.37 x 17.78 x 1.22 cm)
- Library of Congress subjects Integrated circuits - Very large scale
- Library of Congress Catalog Number 2002276015
- Dewey Decimal Code 621.395
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