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The Physics Of Submicron Lithography

The Physics Of Submicron Lithography

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The Physics Of Submicron Lithography

by Valiev, Kamil A

  • Used
  • Hardcover
  • first
Condition
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ISBN 10
0306435780
ISBN 13
9780306435782
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About This Item

Plenum Press, New York, 1992. 1st edition.. Hardback. Laminated boards, F. xii+493pp, text figs, index, a fine copy, as new. Standard text on the physics of electron beam, ion beam, optical & x ray lithography. The book is intended for specialists who are developing or using methods of processing materials into a device whose components are submicron in size.

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Details

Bookseller
Eastleach Books GB (GB)
Bookseller's Inventory #
31144
Title
The Physics Of Submicron Lithography
Author
Valiev, Kamil A
Format/Binding
Hardback
Book Condition
Used
Edition
1st edition.
Binding
Hardcover
ISBN 10
0306435780
ISBN 13
9780306435782
Publisher
Plenum Press, New York
Date Published
1992
Keywords
ISBN 0306435780, physics, x rays, lithography, photolithography

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Eastleach Books

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Eastleach Books

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About Eastleach Books

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