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Handbook of Semiconductor Interconnection Technology
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Handbook of Semiconductor Interconnection Technology Hardcover - 1997

by Scwartz, Geraldine, Schwartz


From the publisher

Covering materials, processes, equipment, methodologies, characterization techniques, clean room practices, and ways to control contamination-related defects, this work offers up-to-date information on the application of interconnection technology to semiconductors. It offers an integration of technical, patent and industry literature.

First line

This chapter covers many of the basic principles and methods used today in semiconductor manufacturing for depositing and etching both dielectric and conducting films.

Details

  • Title Handbook of Semiconductor Interconnection Technology
  • Author Scwartz, Geraldine, Schwartz
  • Binding Hardcover
  • Edition First
  • Pages 577
  • Publisher CRC
  • Date November 24, 1997
  • ISBN 9780824799663
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HANDBOOK OF SEMICONDUCTOR INTERCONNECT TECHNOLOGY
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HANDBOOK OF SEMICONDUCTOR INTERCONNECT TECHNOLOGY

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Handbook of Semiconductor Interconnection Technology
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Handbook of Semiconductor Interconnection Technology

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Handbook of Semiconductor Interconnection Technology

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Handbook of Semiconductor Interconnection Technology
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Handbook of Semiconductor Interconnection Technology

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