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A User's Guide to Ellipsometry
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A User's Guide to Ellipsometry Hardcover - 1992

by Harland G. Tompkins


From the publisher

This book is specifically designed for the user who wishes expanded use of ellipsometry beyond the relatively limited number of turn-key applications. The book provides a concise discussion of theory and instrumentation before describing how to use optical parameters to determine material properties and optical parameters for inaccessible substrates and unknown films, and how to measure extremely thin films. The book also addresses polysilicon, a material commonly used in the microelectronics industry, and the effect of substrate roughness. This book's concepts and applications are reinforced through the 14 case studies that illustrate specific applications of ellipsometry from the semiconductor industry as well as studies involving corrosion and oxide growth.

Details

  • Title A User's Guide to Ellipsometry
  • Author Harland G. Tompkins
  • Binding Hardcover
  • Edition First Edition
  • Publisher Academic Press, Boston, Massachusetts
  • Date 1992-10
  • ISBN 9780126939507
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A User's Guide to Ellipsometry

A User's Guide to Ellipsometry

by Tompkins, Harland G.

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9780126939507 / 0126939500
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Academic Press, 1992. Hardcover. Good. Missing dust jacket; Pages can have notes/highlighting. Spine may show signs of wear. ~ ThriftBooks: Read More, Spend Less.Dust jacket quality is not guaranteed.
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A User's Guide to Ellipsometry
Stock Photo: Cover May Be Different

A User's Guide to Ellipsometry

by Harland G. Tompkins

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  • Hardcover
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Used - Good
Binding
Hardcover
ISBN 10 / ISBN 13
9780126939507 / 0126939500
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Academic Press, 1992-10-20. Hardcover. Good.
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A USER'S GUIDE TO ELLIPSOMETRY.
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A USER'S GUIDE TO ELLIPSOMETRY.

by Tompkins, Harold G.

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Hardcover
ISBN 10 / ISBN 13
9780126939507 / 0126939500
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Academic Press:, 1993. 260 pages. "Ellipsometry is a very old technque for studying surfaces and thein films. It is also used extensively in integrated circuit(IC) manufacture and development, in corrosion science, and various other areas. The fundamental principles of the technqiues are well known. Although the literature is extensive, the few available books deal with the subect on a level that is too mathematical or theoretical for most casual users. FINE- HARDCOVER, black cloth covers, lettering is bright on the spine and cover.. Hard Cover. Fine-/No Dust Jacket Present.. 8vo - over 7¾" - 9¾" tall.
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A User's Guide to Ellipsometry
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A User's Guide to Ellipsometry

by Harland G. Tompkins

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ISBN 10 / ISBN 13
9780126939507 / 0126939500
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A User's Guide to Ellipsometry
Stock Photo: Cover May Be Different

A User's Guide to Ellipsometry

by Tompkins, Harland G

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  • Hardcover
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Hardcover
ISBN 10 / ISBN 13
9780126939507 / 0126939500
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Academic Press, 1992-10-20. Hardcover. New. New. In shrink wrap. Looks like an interesting title!
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$128.44
$5.45 shipping to USA