MEMS Materials and Processes Handbook Hardcover - 2011 - 2011th Edition
by Reza Ghodssi (Editor); Pinyen Lin (Editor)
From the rear cover
MEMS Materials and Processes Handbook is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on 'Materials' and 'Processes'. The extensive 'Material Selection Guide' and a 'Material Database' guides the reader through the selection of appropriate materials for the required task at hand. The 'Processes' section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs. The book also: Provides a comprehensive catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMS Discusses specific MEMS fabrication techniques such as additive, subtractive, and lithography/patterning, as well as wafer bonding, doping, surface treatment/preparation, and characterization techniques Provides the reader with a quick check list of the advantage/disadvantage of fabrication MEMS Material and Processes Handbook will be a valuable book for researchers, engineers and students working in MEMS and materials processing.
Details
- Title MEMS Materials and Processes Handbook
- Author Reza Ghodssi (Editor); Pinyen Lin (Editor)
- Binding Hardcover
- Edition number 2011th
- Edition 2011
- Pages 1188
- Volumes 1
- Language ENG
- Publisher Springer, U.S.A.
- Date 2011
- Illustrated Yes
- Features Bibliography, Illustrated, Index, Table of Contents
- ISBN 9780387473161 / 0387473165
- Weight 4.03 lbs (1.83 kg)
- Dimensions 9.4 x 6.47 x 2.67 in (23.88 x 16.43 x 6.78 cm)
- Dewey Decimal Code 621.381
Media reviews
Citations
- Choice, 10/01/2011, Page 0