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Chemistry and Lithography
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Chemistry and Lithography Hardcover - 2010

by Uzodinma Okoroanyanwu


From the publisher

This text provides a concise treatment of the chemical phenomena in lithography. The book presents topics on the optical and charged particle physics practiced in lithography, with a broader view of how the marriage between chemistry and optics has made possible the print and electronic revolutions of the digital age.

Details

  • Title Chemistry and Lithography
  • Author Uzodinma Okoroanyanwu
  • Binding Hardcover
  • Edition U.S. Edition
  • Pages 861
  • Volumes 1
  • Language ENG
  • Publisher SPIE-International Society for Optical Engine
  • Date 2010-12
  • Illustrated Yes
  • ISBN 9780819475626 / 0819475629
  • Library of Congress subjects Chemistry, Technical, Lithography
  • Library of Congress Catalog Number 2009036266
  • Dewey Decimal Code 621.381